表面硬さと剛性の測定のための画像処理で移動経路制御されたマイクロインデンターロボット開発

A microsurface measurement system that is composed of a microrobot with an indenter, and a vision-based navigation system is proposed for investigating the hardness and stiffness of microparts. The microindentation mechanism is composed of the small force generator mechanism, which is simply combination between a voice coil actuator (VCA) and the tandem leaf spring mechanism. The generated force can be controlled by electrical current, which is supplied to coil and positioned precisely at the balance point with the parallel leaf spring without mechanical friction. And the full bridge strain gauges on both sides of double leaf spring can be detected the small force which is applied to the sample with a microindenter. This handmade small mechanism can produce and verify a small force up to 17 mN with good linearity and 50 μN resolutions. The displacement of the indenter head is measured by a linear variable differential transformer (LVDT) which is included in machine. Thus, this mechanism generates small force and monitors the depth behavior of the indenter during the indentation test. Since the overall mechanism is very small, then it is implemented on the microrobot. The piezo-driven microrobot is capable of moving step by step precisely with 1 μm per step, so the sample surface can be penetrated anywhere by the microindenter. With the benefits of the image processing technique, a vision-based coordination system with a local close-up view and an overall global view has been developed to identify the locations of the robot and the indenter precisely within ±3 μm of accuracy over the working range. The experiment results present the performance of this machine by the surface stiffness investigation of several materials including metal and bio materials. The surface stiffness/hardness was successfully checked, and the indentation load-depth characteristics were precisely acquired. With the surface characteristic results of the certified hardness blocks (30HV and 100HV), the degree of stiffness and hardness can be compared. Finally, the performance of a vision-based navigation system is present on the surface characteristics of the unhealthy human tooth that are precisely acquired at the specified measurement point.電気通信大学201

表面硬さと剛性の測定のための画像処理で移動経路制御されたマイクロインデンターロボット開発

電気通信大学201